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Preparation and Characterization of Organic-Inorganic Hybrid Materials Incorporating Voids via Sol-Gel Reaction for Interlayer Dielectrics

  • Kim Hwan Kyu
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Preparation and Characterization of Organic-Inorganic Hybrid Materials Incorporating Voids via Sol-Gel Reaction for Interlayer Dielectrics
저자
Kim Hwan Kyu
학회명
KJF99

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