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Characterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process Temperatures
Characterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process Temperatures
- 제목
- Characterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process Temperatures
- 제목 (타언어)
- Characterization of ZnO Film Deposited on Silicon and Polymer Substrates by Atomic Layer Deposition at Low Process Temperatures
- 저자
- Byoung-Ho Choi
- 발행일
- 2014-06-16
- 학회명
- ALD 2014
- 개최국가
- 일본
- 학회 개최일
- 2014-06-15 ~ 2015-06-18