Mitigation of Complementary Metal-Oxide-Semiconductor Variability with Metal Gate Metal-Oxide-Semiconductor Field-Effect Transistors

초록

Variability due to Fermi level pinning at polycrystalline silicon gate grain boundary is examined as an additional source of intrinsic parameter fluctuation. Threshold voltage (V-t) variation with metal gate to avoid the variation is found to be mitigated with the measurement of n-channel metal-oxide-semiconductor field-effect transistors (nMOSFETs) with an identical process except gate stack. The statistical variation of intrinsic gate delay and static noise margin of the 6 transistors static random access memory (SRAM) cell is predicted for future technology nodes using Monte Carlo circuit simulation with a process/physics-based compact model. It is found that the variability can be suppressed by similar to 35% with adopting metal gate for 32 nm technology node. (C) 2009 The Japan Society of Applied Physics