ScholarWorks@Korea University

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Title

  • Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ISSN

  • E 2166-2746 | P 1071-1023 | 1071-1023 | 2166-2746

Publisher

  • American Institute of Physics
  • AIP

Listed on(Coverage)

JCR1997-2019
SCI2010-2019
SCIE2010-2021
CC2016-2021
SCOPUS2017-2020

Active

  • Inactive

Country

  • USA

Article List

1 - 20 out of 67 results.

SCIESCOPUS
Comparison of quantitative analyses using SIMS, atom probe tomography, and femtosecond laser ablation inductively coupled plasma mass spectrometry with Si1-XGeX and Fe1-X Ni-X binary alloys

Jang, Yun Jung; Kim, Seon Hee; Kim, Kyung Joong; Kim, Donghwan; Lee, Yeonhee

ArticleIssue Date2020CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.38, no.3PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Effect of proton irradiation energy on SiNx/AlGaN/GaN metal-insulator semiconductor high electron mobility transistors

Fares, Chaker; Ren, Fan; Pearton, Stephen J.; Yang, Gwangseok; Kim, Jihyun; Lo, Chien-Fong; Johnson, J. Wayne

ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.36, no.5PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Effect of alpha-particle irradiation dose on SiNx/AlGaN/GaN metal-insulator semiconductor high electron mobility transistors

Fares, Chaker; Ren, Fan; Pearton, Stephen J.; Yang, Gwangseok; Kim, Jihyun; Lo, Chien-Fong; Johnson, J. Wayne

ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.36, no.4PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Eighteen mega-electron-volt alpha-particle damage in homoepitaxial beta-Ga2O3 Schottky rectifiers

Yang, Jiancheng; Fares, Chaker; Guan, Yu; Ren, F.; Pearton, S. J.; Bae, Jinho; Kim, Jihyun; Kuramata, Akito

ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.36, no.3PublisherA V S AMER INST PHYSICS
SCIESCOPUS
In situ annealing of III1-xMnxV ferromagnetic semiconductors

Liu, Xinyu; Bac, Seul-Ki; Sapkota, Pitambar; Gorsak, Cameron; Li, Xiang; Dong, Sining; Lee, Sanghoon; Ptasinska, Sylwia; Furdyna, Jacek K.; Dobrowolska, Margaret

ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.36, no.2PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Dependence of ferromagnetic properties on phosphorus concentration in Ga1-xMnxAs1-yPy

Li, Xiang; Liu, Xinyu; Dong, Sining; Gorsak, Cameron; Furdyna, Jacek K.; Dobrowolska, Margaret; Bac, Seul-Ki; Lee, Sanghoon; Rouvimov, Sergei

ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.36, no.2PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Analytical study of polymer deposition distribution for two-dimensional trench sidewall in low-k fluorocarbon plasma etching process

Kim, Sun-Woo; Zang, Hwan-Jun; Park, June; Kim, Gwang-Sik; Yu, Hyun-Yong; Ha, Minwoo; Ko, Kyungbo; Park, Sang Soo; Kim, Choon Hwan

ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.36, no.1PublisherA V S AMER INST PHYSICS
SCIESCOPUS
10 MeV proton damage in beta-Ga2O3 Schottky rectifiers

Yang, Jiancheng; Chen, Zhiting; Ren, Fan; Pearton, S. J.; Yang, Gwangseok; Kim, Jihyun; Lee, Jonathan; Flitsiyan, Elena; Chernyak, Leonid; Kuramata, Akito

ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.36, no.1PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Impact of fast transient charging and ambient on mobility of WS2 field-effect transistor

Park, Junghak; Woo, Hyunsuk; Jeon, Sanghun

ArticleIssue Date2017CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.35, no.5PublisherA V S AMER INST PHYSICS
SCIESCOPUS
1.5 MeV electron irradiation damage in beta-Ga2O3 vertical rectifiers

Yang, Jiancheng; Ren, Fan; Pearton, Stephen J.; Yang, Gwangseok; Kim, Jihyun; Kuramata, Akito

ArticleIssue Date2017CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.35, no.3PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Enhanced field emission properties from carbon nanotube emitters on the nanopatterned substrate

Kim, Se Jung; Park, Seol Ah; Kim, Young-Cho; Ju, Byeong-Kwon

ArticleIssue Date2017CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.35, no.1PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Influence of thermal stress on heat-generating performance of indium tin oxide nanoparticle thin films

Yang, Kyungwhan; Cho, Kyoungah; Kim, Sangsig; Im, Kiju

ArticleIssue Date2016CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.34, no.6PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Effect of proton irradiation dose on InAlN/GaN metal-oxide semiconductor high electron mobility transistors with Al2O3 gate oxide

Ahn, Shihyun; Kim, Byung-Jae; Lin, Yi-Hsuan; Ren, Fan; Pearton, Stephen J.; Yang, Gwangseok; Kim, Jihyun; Kravchenko, Ivan I.

ArticleIssue Date2016CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.34, no.5PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Synthesis of freestanding cupric oxide nanotubes with close ends from copper nanowires by the Kirkendall effect

Park, Sungho; Chae, Wonseok; Han, Manso; Jeon, Sanghun

ArticleIssue Date2016CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.34, no.5PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Effects of proton irradiation and thermal annealing on off-state step-stressed AlGaN/GaN high electron mobility transistors

Kim, Byung-Jae; Ahn, Shihyun; Ren, Fan; Pearton, Stephen J.; Yang, Gwangseok; Kim, Jihyun

ArticleIssue Date2016CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.34, no.4PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Effect of 5 MeV proton irradiation damage on performance of beta-Ga2O3 photodetectors

Ahn, Shihyun; Lin, Yi-Hsuan; Ren, Fan; Oh, Sooyeoun; Jung, Younghun; Yang, Gwangseok; Kim, Jihyun; Mastro, Michael A.; Hite, Jennifer K.; Eddy, Charles R., Jr., et al.

ArticleIssue Date2016CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.34, no.4PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Elevated temperature performance of Si-implanted solar-blind beta-Ga2O3 photodetectors

Ahn, Shihyun; Ren, Fan; Oh, Sooyeoun; Jung, Younghun; Kim, Jihyun; Mastro, Michael A.; Hite, Jennifer K.; Eddy, Charles R., Jr.; Pearton, S. J.

ArticleIssue Date2016CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.34, no.4PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Effect of proton irradiation energy on AlGaN/GaN metal-oxide semiconductor high electron mobility transistors

Ahn, Shihyun; Dong, Chen; Zhu, Weidi; Kim, Byung-Jae; Hwang, Ya-Hsi; Ren, Fan; Pearton, Stephen J.; Yang, Gwangseok; Kim, Jihyun; Patrick, Erin, et al.

ArticleIssue Date2015CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.33, no.5PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Effects of 340 keV proton irradiation on InGaN/GaN blue light-emitting diodes

Kim, Byung-Jae; Hwang, Ya-Hsi; Ahn, Shihyun; Ren, Fan; Pearton, Stephen J.; Kim, Jihyun; Jang, Tae Sung

ArticleIssue Date2015CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.33, no.5PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Enhanced open-circuit voltage of InAs/GaAs quantum dot solar cells by hydrogen plasma treatment

Kim, HoSung; Park, MinSu; Kim, SangHyeon; Kim, SangHyuck; Song, JinDong; Choi, WonJun; Park, JungHo; Lee, YooJong

ArticleIssue Date2015CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.33, no.4PublisherA V S AMER INST PHYSICS
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