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Cogent Environmental Science
ISSN
P 2331-1843
출판사
Cogent OA
국가
NORWAY
발행 상태
활성
데이터베이스 수록 정보
CiteScore 2020-2021 (2년)
DOAJ 2017-2023 (7년)
ESCI 2018-2021 (4년)
JCR 2022 (1년)
Scopus 2015-2020 (6년)
SJR 2022-2023 (2년)
전체 4건 중 1번부터 4번까지의 결과를 표시합니다.
2020
Article
PLASMA PARAMETERS AND SiO2 ETCHING KINETICS IN C4F8
- Efremov, A. M. ;
- Betelin, V. B. ;
- Kwon, K. -H.
- 2020
- Izvestiya Vysshikh Uchebnykh Zavedenii, Seriya Khimiya i Khimicheskaya Tekhnologiya
- IVANOVSKOGO KHIMIKO-TEKHNOLOGI TSHESKOGO INST
Article
FEATURES OF SiO2 REACTIVE-ION ETCHING KINETICS IN CF4
- Efremov, Alexander M. ;
- Sobolev, Alexander M. ;
- Kwon, Kwang-Ho
- 2020
- Izvestiya Vysshikh Uchebnykh Zavedenii, Seriya Khimiya i Khimicheskaya Tekhnologiya
- IVANOVSKOGO KHIMIKO-TEKHNOLOGI TSHESKOGO INST
2019
Article
PLASMA PARAMETERS AND KINETICS OF ACTIVE SPECIES IN HBr
- Efremov, Aleksandr M. ;
- Betelin, Vladimir B. ;
- Kwon, Kwang-Ho ;
- Snegirev, Dmitriy G.
- 2019
- Izvestiya Vysshikh Uchebnykh Zavedenii, Seriya Khimiya i Khimicheskaya Tekhnologiya
- IVANOVSKOGO KHIMIKO-TEKHNOLOGI TSHESKOGO INST
2017
Article
PLASMA PARAMETERS AND COMPOSITION IN CF4/O-2/Ar GAS MIXTURE
- Efremov, A. M. ;
- Kwon, K. -H.
- 2017
- Izvestiya Vysshikh Uchebnykh Zavedenii, Seriya Khimiya i Khimicheskaya Tekhnologiya
- IVANOVSKOGO KHIMIKO-TEKHNOLOGI TSHESKOGO INST