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The Innovation
ISSN
P 2666-6758
출판사
Elsevier
국가
USA
발행 상태
활성
데이터베이스 수록 정보
CiteScore 2020-2025 (6년)
DOAJ 2021-2025 (5년)
ESCI 2022-2026 (5년)
JCR 2022-2025 (4년)
Scopus 2020-2026 (7년)
SJR 2022-2025 (4년)
전체 5건 중 1번부터 5번까지의 결과를 표시합니다.
2023
Article
Noble gas effect on ACL etching selectivity to SiO2 films
- Choi, Gilyoung ;
- Efremov, Alexander ;
- Son, Hye Jun ;
- Kwon, Kwang-Ho
- 2023-06-08
- Plasma Processes and Polymers
- WILEY-V C H VERLAG GMBH
Article
High-aspect-ratio oxide etching using CF4/C6F12O plasma in an inductively coupled plasma etching system with low-frequency bias power
- Kim, Jinhyuk ;
- Choi, Gilyoung ;
- Kwon, Kwang-Ho
- 2023-03-01
- Plasma Processes and Polymers
- WILEY-V C H VERLAG GMBH
2022
Article
Comparative study of CF4 + O-2 and C6F12O + O-2 plasmas for reactive-ion etching applications
- Lim, Nomin ;
- Efremov, Alexander ;
- Woo, Byungjun ;
- Kwon, Kwang-Ho
- 2022-02
- Plasma Processes and Polymers
- WILEY-V C H VERLAG GMBH
2021
Article
Gas-phase chemistry and reactive-ion etching kinetics for silicon-based materials in C4F8 + O-2 + Ar plasma
- Lee, Byung Jun ;
- Efremov, Alexander ;
- Kwon, Kwang-Ho
- 2021-07
- Plasma Processes and Polymers
- WILEY-V C H VERLAG GMBH
2012
Article
Plasma Processing: Technology for the Batch Fabrication of Carbon Nanotube Film Electrodes for Biointerfaces
- Kim, Joon Hyub ;
- Lee, Myung Jin ;
- Park, Eun Jin ;
- Lee, Jun-Yong ;
- Lee, Cheol Jin ;
- 외 1명
- 2012-09
- Plasma Processes and Polymers
- WILEY-V C H VERLAG GMBH