Xi, Yuyin; Liu, Lu; Hwang, Ya-Hsi; Phillips, Oluwadamilola; Ren, Fan; Pearton, Stephen J.; Kim, Jihyun; Hsu, Chien-Hsing; Lo, Chien-Fong; Johnson, Jerry Wayne
ArticleIssue Date2013CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.31, no.3PublisherA V S AMER INST PHYSICS