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A stiff and flat membrane operated DC contact type RF MEMS switch with low actuation voltage

Kim, Jongseok; Kwon, Sangwook; Jeong, Heemoon; Hong, Youngtack; Lee, Sanghun; Song, Insang; Ju, Byeongkwon

ArticleIssue Date2009CitationSENSORS AND ACTUATORS A-PHYSICAL, v.153, no.1, pp 114 - 119PublisherELSEVIER SCIENCE SA
SCIESCOPUS
Thick membrane operated rf microelectromechanical system switch with low actuation voltage

Kim, Jongseok; Kwon, Sangwook; Hong, Youngtack; Jeong, Heemoon; Song, Insang; Ju, Byeongkwon

ArticleIssue Date2009CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.27, no.1, pp 1 - 5PublisherA V S AMER INST PHYSICS
SCIESCOPUS
Thick-membrane-operated radio frequency switches with wafer-level package using gold compressive bonding

Kim, Jongseok; Kwon, Sangwook; Hong, Youngtack; Song, Insang; Jeong, Heemoon; Choi, Hyung; Ju, Byeongkwon

ArticleIssue Date2009CitationJOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.8, no.4PublisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
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