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One-Step Etching Characteristics of ITO/Ag/ITO Multilayered Electrode in High-Density and High-Electron-Temperature Plasma

Yoon, Ho-Won; Shin, Seung-Min; Kwon, Seong-Yong; Cho, Hyun-Min; Kim, Sang-Gab; Hong, Mun-Pyo

ArticleIssue Date2021CitationMATERIALS, v.14, no.8PublisherMDPI
1
STATISTICS
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