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SCIESCOPUS
Advanced semiconductor fabrication process control using dual filter exponentially weighted moving average

Ko, Hyo-Heon; Kim, Jihyun; Park, Sang-Hoon; Baek, Jun-Geol; Kim, Sung-Shick

ArticleIssue Date2012CitationJOURNAL OF INTELLIGENT MANUFACTURING, v.23, no.3, pp 443 - 455PublisherSPRINGER
SCIESCOPUS
Dispatching rule for non-identical parallel machines with sequence-dependent setups and quality restrictions

Ko, Hyo-Heon; Kim, Jihyun; Kim, Sung-Shick; Baek, Jun-Geol

ArticleIssue Date2010CitationCOMPUTERS & INDUSTRIAL ENGINEERING, v.59, no.3, pp 448 - 457PublisherPERGAMON-ELSEVIER SCIENCE LTD
SCIESCOPUS
Intelligent adaptive process control using dynamic deadband for semiconductor manufacturing

Ko, Hyo-Heon; Kim, Jun-Seok; Kim, Jihyun; Baek, Jun-Geol; Kim, Sung-Shick

ArticleIssue Date2011CitationEXPERT SYSTEMS WITH APPLICATIONS, v.38, no.6, pp 6759 - 6767PublisherPERGAMON-ELSEVIER SCIENCE LTD
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