Kim, Youngkeun; Kang, Sungchil; Ham, Yong-Hyun; Kwon, Kwang-Ho; Shutov, Dmitriy Alexandrovich; Lee, Hyun-Woo; Lee, Jae Jong; Do, Lee-Mi; Baek, Kyu-Ha
ArticleIssue Date2012CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.30, no.3PublisherA V S AMER INST PHYSICS