Lee, Jin Woo; Lee, Kyong Soo; Ju, Byeong Kwon; Cho, Hyun Jin; Lee, Nae Sung; Kim, Min Young; Kim, Eun Hye; Lee, Kyu Back
ArticleIssue Date2009CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.27, no.6, pp.2444 - 2448PublisherA V S AMER INST PHYSICS