Lo, C. F.; Kim, H. -Y.; Kim, J.; Chen, Shu-Han; Wang, Sheng-Yu; Chyi, Jen-Inn; Chou, B. Y.; Chen, K. H.; Wang, Y. L.; Chang, C. Y., et al.
ArticleIssue Date2009CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.27, no.6, pp.L33 - L37PublisherA V S AMER INST PHYSICS