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Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure

Authors
Shin, Jea-ShikSong, InsangLee, Moon-ChulKim, Chul-SooSon, Sang UkKim, Duck-HwanPark, Ho-SooCui, JingAi, YujieHwang, SungwooRieh, Jae-Sung
Issue Date
2014
Publisher
IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG
Keywords
BAW; FBAR; Q-factors; RF resonator
Citation
IEICE ELECTRONICS EXPRESS, v.11, no.6
Indexed
SCIE
SCOPUS
Journal Title
IEICE ELECTRONICS EXPRESS
Volume
11
Number
6
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/101249
DOI
10.1587/elex.11.20130938
ISSN
1349-2543
Abstract
A bulk acoustic wave (BAW) resonator with suppressed energy loss is proposed. Implemented with air edge reflector and current spreading electrode along the perimeter region of the BAW, the resonator successfully suppresses the acoustic wave leakage and the electric energy loss as well. As results of optimized lateral structure, the Q-factor at anti-resonance frequency (Q(a)) is significantly improved to over 2100. Furthermore, the peak insertion loss exhibits as low as 0.04 dB and effective electro-mechanical coupling coefficient (kt(2)), which is essential to achieve wide band-width of RF filters, is 6.54%.
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공과대학 (전기전자공학부)
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