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Review of radiation damage in GaN-based materials and devices

Authors
Pearton, Stephen J.Deist, RichardRen, FanLiu, LuPolyakov, Alexander Y.Kim, Jihyun
Issue Date
9월-2013
Publisher
A V S AMER INST PHYSICS
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.31, no.5
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume
31
Number
5
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/102277
DOI
10.1116/1.4799504
ISSN
0734-2101
Abstract
A review of the effects of proton, neutron, gamma-ray, and electron irradiation on GaN materials and devices is presented. Neutron irradiation tends to create disordered regions in the GaN, while the damage from the other forms of radiation is more typically point defects. In all cases, the damaged region contains carrier traps that reduce the mobility and conductivity of the GaN and at high enough doses, a significant degradation of device performance. GaN is several orders of magnitude more resistant to radiation damage than GaAs of similar doping concentrations. In terms of heterostructures, preliminary data suggests that the radiation hardness decreases in the order AlN/GaN > AlGaN/GaN > InAlN/GaN, consistent with the average bond strengths in the Al-based materials. (C) 2013 American Vacuum Society.
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