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Highly Ordered TiO2 Nanotubes on Patterned Substrates: Synthesis-in-Place for Ultrasensitive Chemiresistors

Authors
Kim, Do HongShim, Young-SeokMoon, Hi GyuChang, Hye JungSu, DongKim, Soo YoungKim, Jin-SangJu, Byeong KwonYoon, Seok-JinJang, Ho Won
Issue Date
29-8월-2013
Publisher
AMER CHEMICAL SOC
Citation
JOURNAL OF PHYSICAL CHEMISTRY C, v.117, no.34, pp.17824 - 17831
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF PHYSICAL CHEMISTRY C
Volume
117
Number
34
Start Page
17824
End Page
17831
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/102418
DOI
10.1021/jp405150b
ISSN
1932-7447
Abstract
Integrating a highly ordered TiO2 nanotube array with patterned substrates is an effective design strategy for taking advantage of one-dimensional nanotube structures such as high surface-to-volume ratio and novel functionalities of TiO2, but many challenges remain in synthesis. Here we report a novel synthesis-in-place method for highly ordered vertical TiO2 nanotube films on various patterned substrates and the application of the films to chemiresistive sensors. A unique synthetic strategy, in which the Pt bottom electrodes were clamped during anodization, leads to the complete anodization of the Ti layer to TiO2 nanotubes not only on SiO2/Si substrates but also on glass and sapphire substrates, which can be used as chemiresistors without additional processes. TiO2 nanotube sensors on SiO2/Si substrates show unprecedentedly ultrahigh responses to ethanol and acetone with detection limits down to parts per billion levels. Beyond the high sensitivity, selective responses to ethanol and acetone create opportunities for application in breath analyzers to diagnose human respiratory diseases.
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공과대학 (전기전자공학부)
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