Improved reliability of Ti/ZrN/Pt resistive switching memory cells using hydrogen postannealing
DC Field | Value | Language |
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dc.contributor.author | Kim, Hee-Dong | - |
dc.contributor.author | Yun, Min Ju | - |
dc.contributor.author | Hong, Seok Man | - |
dc.contributor.author | An, Ho-Myoung | - |
dc.contributor.author | Kim, Tae Geun | - |
dc.date.accessioned | 2021-09-06T00:27:27Z | - |
dc.date.available | 2021-09-06T00:27:27Z | - |
dc.date.created | 2021-06-14 | - |
dc.date.issued | 2013-07 | - |
dc.identifier.issn | 1071-1023 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/102926 | - |
dc.description.abstract | The authors investigated the effects of hydrogen postannealing on data retention and set/reset current variation in a Ti/ZrN/Pt resistive switching memory cell. Annealing the Ti/ZrN/Pt sample in a N-2+H-2 ambient gas versus a N-2 ambient gas reduced the set currents from 10.4 to 4.1 mA and the reset currents from 1.2 to 0.2 mu A, whereas the current ratio increased from similar to 9 x 10(3) to similar to 2 x 10(4). In addition, current variations in the set and reset states decrease at temperatures of 25 and 85 degrees C (>10yr) due to reduction of the interface trap by hydrogen passivation effects. (C) 2013 American Vacuum Society. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | A V S AMER INST PHYSICS | - |
dc.title | Improved reliability of Ti/ZrN/Pt resistive switching memory cells using hydrogen postannealing | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kim, Tae Geun | - |
dc.identifier.doi | 10.1116/1.4813792 | - |
dc.identifier.scopusid | 2-s2.0-84887419859 | - |
dc.identifier.wosid | 000322379800021 | - |
dc.identifier.bibliographicCitation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.31, no.4 | - |
dc.relation.isPartOf | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | - |
dc.citation.title | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | - |
dc.citation.volume | 31 | - |
dc.citation.number | 4 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
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