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Large-Area Printed Broadband Membrane Reflectors by Laser Interference Lithography
- Authors
- Seo, Jung-Hun; Park, Jungho; Zhao, Deyin; Yang, Hongjun; Zhou, Weidong; Ju, Byeong-Kwon; Ma, Zhenqiang
- Issue Date
- Feb-2013
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Keywords
- Broadband membrane reflectors (MRs); transfer printing; silicon nanomembrane; laser interference lithography (LIL)
- Citation
- IEEE PHOTONICS JOURNAL, v.5, no.1
- Indexed
- SCIE
SCOPUS
- Journal Title
- IEEE PHOTONICS JOURNAL
- Volume
- 5
- Number
- 1
- ISSN
- 1943-0655
- Abstract
- We report here large-area broadband photonic crystal membrane reflectors (MRs) on glass substrates based on laser interference lithography (LIL) patterning and elastic stamp membrane transfer printing techniques. High-reflectivity broadband MRs on glass were realized with measured reflectivity of 95% around 1300 nm and a bandwidth of about 100 nm. Large-area nanopattern uniformity was experimentally verified with measured reflectivity from multiple locations of the large-area MRs. The work could lead to fabrication of the large-area high-performance MR at low cost with high throughput. The reflectors can be used in many types of optoelectronic and photonic devices.
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Related Researcher
- Ju, Byeong kwon
- College of Engineering (School of Electrical Engineering)