Processing Technique for Single-Walled Carbon Nanotube-Based Sensor Arrays
- Authors
- Kim, Kyeong Heon; Jang, Chi Woong; Kim, Tae Geun; Lee, Seok; Kim, Sun Ho; Byun, Young Tae
- Issue Date
- 2월-2012
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Keywords
- SWCNT; Photolithography; FET Arrays; SAM; Sensor
- Citation
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.12, no.2, pp.1251 - 1255
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Volume
- 12
- Number
- 2
- Start Page
- 1251
- End Page
- 1255
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/106203
- DOI
- 10.1166/jnn.2012.4661
- ISSN
- 1533-4880
- Abstract
- We investigated a selective assembly method of fabricating single-walled carbon nanotubes (SWCNTs) on a silicon-dioxide (SiO2) surface by using only a photolithographic process; then, we fabricated 8 x 8 field-emission transistor (FET) arrays for sensor applications. Photoresist (PR) patterns were made on a SiO2-grown Si substrate by using the photolithographic process. This PR-patterned substrate was dipped into a SWCNT solution dispersed in dichlorobenzene (DCB). The PR patterns were removed by using acetone. As a result, selectively-assembled SWCNT channels in 8 x 8 FET arrays could be fabricated between source and drain electrodes without complicated chemical steps using octadecyltrichlorosilane (OTS). Finally, we successfully fabricated 8 x 8 SWCNT-based multi-channel FET arrays by using our novel self-assembly method.
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