Large in-plane permittivity of Ba0.6Sr0.4TiO3 thin films crystallized using excimer laser annealing at 300 degrees C
DC Field | Value | Language |
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dc.contributor.author | Kang, Min-Gyu | - |
dc.contributor.author | Cho, Kwang-Hwan | - |
dc.contributor.author | Do, Young Ho | - |
dc.contributor.author | Lee, Young-Jin | - |
dc.contributor.author | Nahm, Sahn | - |
dc.contributor.author | Yoon, Seok-Jin | - |
dc.contributor.author | Kang, Chong-Yun | - |
dc.date.accessioned | 2021-09-06T12:02:09Z | - |
dc.date.available | 2021-09-06T12:02:09Z | - |
dc.date.created | 2021-06-14 | - |
dc.date.issued | 2012-12-10 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/106665 | - |
dc.description.abstract | We demonstrated a way to fabricate the crystalline Ba0.6Sr0.4TiO3 (BST) thin films using excimer laser annealing technique on the amorphous BST thin films fabricated by sol-gel process. The grain size of the laser-annealed films is larger than that of the conventionally thermal-annealed films. However, an uncrystallized, amorphous layer was observed near the film/substrate interface due to the limited laser absorption depth. The uncrystallized layer has a critical influence on out-of-plane dielectric property of BST films. The significant difference of the relative dielectric permittivity (epsilon(r)) between in-plane (1383) and out-of-plane (184) directions is observed. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4770307] | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | SUPER-LATERAL-GROWTH | - |
dc.subject | SI | - |
dc.subject | KINETICS | - |
dc.title | Large in-plane permittivity of Ba0.6Sr0.4TiO3 thin films crystallized using excimer laser annealing at 300 degrees C | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Nahm, Sahn | - |
dc.contributor.affiliatedAuthor | Kang, Chong-Yun | - |
dc.identifier.doi | 10.1063/1.4770307 | - |
dc.identifier.scopusid | 2-s2.0-84871328631 | - |
dc.identifier.wosid | 000312490000071 | - |
dc.identifier.bibliographicCitation | APPLIED PHYSICS LETTERS, v.101, no.24 | - |
dc.relation.isPartOf | APPLIED PHYSICS LETTERS | - |
dc.citation.title | APPLIED PHYSICS LETTERS | - |
dc.citation.volume | 101 | - |
dc.citation.number | 24 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | SUPER-LATERAL-GROWTH | - |
dc.subject.keywordPlus | SI | - |
dc.subject.keywordPlus | KINETICS | - |
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