UV ozone treatment for improving contact resistance on graphene
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chen, Chung Wei | - |
dc.contributor.author | Ren, Fan | - |
dc.contributor.author | Chi, Gou-Chung | - |
dc.contributor.author | Hung, Sheng-Chun | - |
dc.contributor.author | Huang, Y. P. | - |
dc.contributor.author | Kim, Jihyun | - |
dc.contributor.author | Kravchenko, Ivan I. | - |
dc.contributor.author | Pearton, Stephen J. | - |
dc.date.accessioned | 2021-09-06T13:37:39Z | - |
dc.date.available | 2021-09-06T13:37:39Z | - |
dc.date.created | 2021-06-15 | - |
dc.date.issued | 2012-11 | - |
dc.identifier.issn | 1071-1023 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/106996 | - |
dc.description.abstract | Optimized UV ozone cleaning of graphene layers on SiO2/Si substrates is shown to improve contact resistance of e-beam evaporated Ti/Au contacts by three orders of magnitude (3 x 10(-6) Omega-cm(2)) compared to untreated surfaces (4 x 10(-3) Omega-cm(2)). Subsequent annealing at 300 degrees C lowers the minimum value achieved to 7 x 10(-7) Omega-cm(2). Ozone exposure beyond an optimum time (6 min in these experiments) led to a sharp increase in sheet resistance of the graphene, producing degraded contact resistance. The UV ozone treatment is a simple and effective method for producing high quality contacts to graphene. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.4754566] | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | A V S AMER INST PHYSICS | - |
dc.subject | SINGLE-LAYER GRAPHENE | - |
dc.subject | OXIDE | - |
dc.title | UV ozone treatment for improving contact resistance on graphene | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kim, Jihyun | - |
dc.identifier.doi | 10.1116/1.4754566 | - |
dc.identifier.scopusid | 2-s2.0-84870336932 | - |
dc.identifier.wosid | 000311667300082 | - |
dc.identifier.bibliographicCitation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.30, no.6 | - |
dc.relation.isPartOf | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | - |
dc.citation.title | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | - |
dc.citation.volume | 30 | - |
dc.citation.number | 6 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | SINGLE-LAYER GRAPHENE | - |
dc.subject.keywordPlus | OXIDE | - |
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