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A fully microfabricated carbon nanotube three-electrode system on glass substrate for miniaturized electrochemical biosensors

Authors
Kim, Joon HyubLee, Jun-YongJin, Joon-HyungPark, Chan WonLee, Cheol JinMin, Nam Ki
Issue Date
6월-2012
Publisher
SPRINGER
Keywords
Spray-coated SWCNT; Plasma functionalization; Biosensor; Three electrode system
Citation
BIOMEDICAL MICRODEVICES, v.14, no.3, pp.613 - 624
Indexed
SCIE
SCOPUS
Journal Title
BIOMEDICAL MICRODEVICES
Volume
14
Number
3
Start Page
613
End Page
624
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/108316
DOI
10.1007/s10544-012-9640-0
ISSN
1387-2176
Abstract
We present an integration process to fabricate single-walled carbon nanotube (SWCNT) three-electrode systems on glass substrate for electrochemical biosensors. Key issues involve optimization of the SWCNT working electrode to achieve high sensitivity, developing an optimal Ag/AgCl reference electrode with good stability, and process development to integrate these electrodes. Multiple spray coatings of the SWCNT film on glass substrate enabled easier integration of the SWCNT film into an electrochemical three-electrode system. O-2 plasma etching and subsequent activation of spray-coated SWCNT films were needed to pattern and functionalize the SWCNT working electrode films without serious damage to the SWCNTs, and to remove organic residues. The microfabricated three-electrode systems were characterized by microscopic and spectroscopic techniques, and the electrochemical properties were investigated using cyclic voltammetry and chrono-amperometry. The fully-integrated CNT three-electrode system showed an effective working electrode area about three times larger than its geometric surface area and an improved electrochemical activity for hydrogen peroxide decomposition. Finally, the effectiveness of miniaturized pf-SWCNT electrodes as biointerfaces was examined by applying them to immunosensors to detect , based on a direct sandwich enzyme-linked immunosorbent assay (ELISA) format with 3,3',5,5'-tetramethylbenzidine dihydrochloride/hydrogen peroxide(TMB/H2O2) as the substrate/mediator system. The lower detection limit of the pf-SWCNT-based immunosensors to is about 1500 times lower than that of the standard ELISA assay.
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