Fabrication and Characterization of an Attonewton-sensitivity Si Cantilever with an Nb Micro-ring
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Yun Won | - |
dc.contributor.author | Choi, Heon Hwa | - |
dc.contributor.author | Choi, Jae-Hyuk | - |
dc.contributor.author | Lee, Soon-Gul | - |
dc.date.accessioned | 2021-09-06T21:49:43Z | - |
dc.date.available | 2021-09-06T21:49:43Z | - |
dc.date.created | 2021-06-18 | - |
dc.date.issued | 2012-04 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/108855 | - |
dc.description.abstract | We have fabricated ultrasensitive silicon cantilevers integrated with a superconducting Nb microring as a key part of a flux quantum-based force measurement system and have characterized both their mechanical and superconducting properties by using mechanical methods. A 50-nm-thick Nb ring with inner and outer radii of 5 mu m and 10 mu m was mounted by DC magnetron sputtering and lift-off on the end of a 410-mu m-long, 4-mu m-wide and 340-nm-thick single-crystalline silicon cantilever. The cantilever showed a force sensitivity as good as 4.2 aN/root Hz at 3 K, which was estimated from its spring constant of 2.6 x 10(-5) N/m and a quality factor of 31000. The superconducting property of the Nb micro-ring was observed from the variation of the cantilever's vibration amplitude while the vibration was driven by an excitation coil, showing a transition temperature of 7 K. The superconducting transition was also confirmed through an electrical transport measurement for a separately-prepared Nb strip film on a silicon wafer. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.title | Fabrication and Characterization of an Attonewton-sensitivity Si Cantilever with an Nb Micro-ring | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Lee, Soon-Gul | - |
dc.identifier.doi | 10.3938/jkps.60.973 | - |
dc.identifier.scopusid | 2-s2.0-84879832066 | - |
dc.identifier.wosid | 000304100000001 | - |
dc.identifier.bibliographicCitation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.60, no.7, pp.L973 - L977 | - |
dc.relation.isPartOf | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.citation.title | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.citation.volume | 60 | - |
dc.citation.number | 7 | - |
dc.citation.startPage | L973 | - |
dc.citation.endPage | L977 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.identifier.kciid | ART001652652 | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
dc.subject.keywordAuthor | Si cantilever | - |
dc.subject.keywordAuthor | MEMS | - |
dc.subject.keywordAuthor | Attonewton | - |
dc.subject.keywordAuthor | Nb superconductor | - |
dc.subject.keywordAuthor | Micro-ring | - |
dc.subject.keywordAuthor | Mechanical detection | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.