Fabrication and Characterization of an Attonewton-sensitivity Si Cantilever with an Nb Micro-ring
- Authors
- Kim, Yun Won; Choi, Heon Hwa; Choi, Jae-Hyuk; Lee, Soon-Gul
- Issue Date
- 4월-2012
- Publisher
- KOREAN PHYSICAL SOC
- Keywords
- Si cantilever; MEMS; Attonewton; Nb superconductor; Micro-ring; Mechanical detection
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.60, no.7, pp.L973 - L977
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 60
- Number
- 7
- Start Page
- L973
- End Page
- L977
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/108855
- DOI
- 10.3938/jkps.60.973
- ISSN
- 0374-4884
- Abstract
- We have fabricated ultrasensitive silicon cantilevers integrated with a superconducting Nb microring as a key part of a flux quantum-based force measurement system and have characterized both their mechanical and superconducting properties by using mechanical methods. A 50-nm-thick Nb ring with inner and outer radii of 5 mu m and 10 mu m was mounted by DC magnetron sputtering and lift-off on the end of a 410-mu m-long, 4-mu m-wide and 340-nm-thick single-crystalline silicon cantilever. The cantilever showed a force sensitivity as good as 4.2 aN/root Hz at 3 K, which was estimated from its spring constant of 2.6 x 10(-5) N/m and a quality factor of 31000. The superconducting property of the Nb micro-ring was observed from the variation of the cantilever's vibration amplitude while the vibration was driven by an excitation coil, showing a transition temperature of 7 K. The superconducting transition was also confirmed through an electrical transport measurement for a separately-prepared Nb strip film on a silicon wafer.
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Collections - College of Science and Technology > Semiconductor Physics in Division of Display and Semiconductor Physics > 1. Journal Articles
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