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Effect of plasma treatment on the gas sensor with single-walled carbon nanotube paste
- Authors
- Dong, Ki-Young; Ham, Dae-Jin; Kang, Byung Hyun; Lee, Keunsoo; Choi, Jinnil; Lee, Jin-Woo; Choi, Hyang Hee; Ju, Byeong-Kwon
- Issue Date
- 30-1월-2012
- Publisher
- ELSEVIER
- Keywords
- Carbon nanotube; Gas sensors; Plasma treatment; Screen printing
- Citation
- TALANTA, v.89, pp.33 - 37
- Indexed
- SCIE
SCOPUS
- Journal Title
- TALANTA
- Volume
- 89
- Start Page
- 33
- End Page
- 37
- ISSN
- 0039-9140
- Abstract
- The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O-2 plasma-treated SWCNT pastes exhibited a large response to NO2 exposure and the fluorinated gas, such as CF4 and SF6, plasma-treated SWCNT pastes exhibited a large response to NH3 exposure. (C) 2011 Elsevier B.V. All rights reserved.
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