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Effect of plasma treatment on the gas sensor with single-walled carbon nanotube paste

Authors
Dong, Ki-YoungHam, Dae-JinKang, Byung HyunLee, KeunsooChoi, JinnilLee, Jin-WooChoi, Hyang HeeJu, Byeong-Kwon
Issue Date
30-1월-2012
Publisher
ELSEVIER
Keywords
Carbon nanotube; Gas sensors; Plasma treatment; Screen printing
Citation
TALANTA, v.89, pp.33 - 37
Indexed
SCIE
SCOPUS
Journal Title
TALANTA
Volume
89
Start Page
33
End Page
37
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/109049
DOI
10.1016/j.talanta.2011.11.040
ISSN
0039-9140
Abstract
The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O-2 plasma-treated SWCNT pastes exhibited a large response to NO2 exposure and the fluorinated gas, such as CF4 and SF6, plasma-treated SWCNT pastes exhibited a large response to NH3 exposure. (C) 2011 Elsevier B.V. All rights reserved.
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