Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
High density phase change data on flexible substrates by thermal curing type nanoimprint lithography
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong, Sung-Hoon | - |
| dc.contributor.author | Jeong, Jun-Ho | - |
| dc.contributor.author | Kim, Kang-In | - |
| dc.contributor.author | Lee, Heon | - |
| dc.date.accessioned | 2021-09-07T09:48:10Z | - |
| dc.date.available | 2021-09-07T09:48:10Z | - |
| dc.date.created | 2021-06-19 | - |
| dc.date.issued | 2011-08 | - |
| dc.identifier.issn | 0167-9317 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/111856 | - |
| dc.description.abstract | In this study, high density phase change nano-pillar device (Tera-bit per inch(2) data density) was fabricated on flexible substrates by thermal curing type nanoimprint lithography with high throughput at a relatively low temperature (120 degrees C). Phase change nano-pillar was formed with on flexible poly (ethylene terephthalate) (PET) film, polyimide (PI) film, and stainless steel plate (SUS) substrate without any damage of substrate. The electrical property of the fabricated phase change nano-pillar device was confirmed by electrical signal measuring of conductive atomic force microscopy. (C) 2011 Elsevier B.V. All rights reserved. | - |
| dc.language | English | - |
| dc.language.iso | en | - |
| dc.publisher | ELSEVIER SCIENCE BV | - |
| dc.subject | FABRICATION | - |
| dc.subject | POLYMERS | - |
| dc.subject | IMPRINT | - |
| dc.title | High density phase change data on flexible substrates by thermal curing type nanoimprint lithography | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Lee, Heon | - |
| dc.identifier.doi | 10.1016/j.mee.2011.01.057 | - |
| dc.identifier.wosid | 000293663400092 | - |
| dc.identifier.bibliographicCitation | MICROELECTRONIC ENGINEERING, v.88, no.8, pp.2013 - 2016 | - |
| dc.relation.isPartOf | MICROELECTRONIC ENGINEERING | - |
| dc.citation.title | MICROELECTRONIC ENGINEERING | - |
| dc.citation.volume | 88 | - |
| dc.citation.number | 8 | - |
| dc.citation.startPage | 2013 | - |
| dc.citation.endPage | 2016 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Article | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
| dc.relation.journalResearchArea | Optics | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
| dc.relation.journalWebOfScienceCategory | Optics | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.subject.keywordPlus | FABRICATION | - |
| dc.subject.keywordPlus | POLYMERS | - |
| dc.subject.keywordPlus | IMPRINT | - |
| dc.subject.keywordAuthor | Nanoimprint lithography | - |
| dc.subject.keywordAuthor | Flexible nano-device | - |
| dc.subject.keywordAuthor | Phase change nano-pillar device | - |
| dc.subject.keywordAuthor | Phase change memory | - |
| dc.subject.keywordAuthor | Tera-bit record | - |
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.