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High density phase change data on flexible substrates by thermal curing type nanoimprint lithography
- Authors
- Hong, Sung-Hoon; Jeong, Jun-Ho; Kim, Kang-In; Lee, Heon
- Issue Date
- 8월-2011
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- Nanoimprint lithography; Flexible nano-device; Phase change nano-pillar device; Phase change memory; Tera-bit record
- Citation
- MICROELECTRONIC ENGINEERING, v.88, no.8, pp.2013 - 2016
- Indexed
- SCIE
SCOPUS
- Journal Title
- MICROELECTRONIC ENGINEERING
- Volume
- 88
- Number
- 8
- Start Page
- 2013
- End Page
- 2016
- ISSN
- 0167-9317
- Abstract
- In this study, high density phase change nano-pillar device (Tera-bit per inch(2) data density) was fabricated on flexible substrates by thermal curing type nanoimprint lithography with high throughput at a relatively low temperature (120 degrees C). Phase change nano-pillar was formed with on flexible poly (ethylene terephthalate) (PET) film, polyimide (PI) film, and stainless steel plate (SUS) substrate without any damage of substrate. The electrical property of the fabricated phase change nano-pillar device was confirmed by electrical signal measuring of conductive atomic force microscopy. (C) 2011 Elsevier B.V. All rights reserved.
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