Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shin, Ju-Hyeon | - |
dc.contributor.author | Lee, Seong-Hwan | - |
dc.contributor.author | Byeon, Kyeong-Jae | - |
dc.contributor.author | Han, Kang-Soo | - |
dc.contributor.author | Lee, Heon | - |
dc.contributor.author | Tsunozaki, Kentaro | - |
dc.date.accessioned | 2021-09-07T10:19:45Z | - |
dc.date.available | 2021-09-07T10:19:45Z | - |
dc.date.created | 2021-06-19 | - |
dc.date.issued | 2011-07-18 | - |
dc.identifier.issn | 1931-7573 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/111977 | - |
dc.description.abstract | UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | SPRINGER | - |
dc.subject | FLASH IMPRINT LITHOGRAPHY | - |
dc.subject | X-RAY-LITHOGRAPHY | - |
dc.subject | PHOTONIC CRYSTALS | - |
dc.subject | RESOLUTION | - |
dc.subject | SUBSTRATE | - |
dc.subject | PATTERNS | - |
dc.subject | STEP | - |
dc.title | Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Lee, Heon | - |
dc.identifier.doi | 10.1186/1556-276X-6-458 | - |
dc.identifier.scopusid | 2-s2.0-84860377631 | - |
dc.identifier.wosid | 000296646900001 | - |
dc.identifier.bibliographicCitation | NANOSCALE RESEARCH LETTERS, v.6 | - |
dc.relation.isPartOf | NANOSCALE RESEARCH LETTERS | - |
dc.citation.title | NANOSCALE RESEARCH LETTERS | - |
dc.citation.volume | 6 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | FLASH IMPRINT LITHOGRAPHY | - |
dc.subject.keywordPlus | X-RAY-LITHOGRAPHY | - |
dc.subject.keywordPlus | PHOTONIC CRYSTALS | - |
dc.subject.keywordPlus | RESOLUTION | - |
dc.subject.keywordPlus | SUBSTRATE | - |
dc.subject.keywordPlus | PATTERNS | - |
dc.subject.keywordPlus | STEP | - |
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