Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film
- Authors
- Shin, Ju-Hyeon; Lee, Seong-Hwan; Byeon, Kyeong-Jae; Han, Kang-Soo; Lee, Heon; Tsunozaki, Kentaro
- Issue Date
- 18-7월-2011
- Publisher
- SPRINGER
- Citation
- NANOSCALE RESEARCH LETTERS, v.6
- Indexed
- SCIE
SCOPUS
- Journal Title
- NANOSCALE RESEARCH LETTERS
- Volume
- 6
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/111977
- DOI
- 10.1186/1556-276X-6-458
- ISSN
- 1931-7573
- Abstract
- UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.
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Collections - College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
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