Simple Assembling Technique of Single-Walled Carbon Nanotubes Using Only Photolithography
- Authors
- Kim, Kyeong Heon; Kim, Tae Geun; Lee, Seok; Jhon, Young Min; Kim, Sun Ho; Byun, Young Tae
- Issue Date
- 5월-2011
- Publisher
- KOREAN PHYSICAL SOC
- Keywords
- SWCNT; FET; Photolithography; SAM
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.58, no.5, pp.1380 - 1383
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 58
- Number
- 5
- Start Page
- 1380
- End Page
- 1383
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/112517
- DOI
- 10.3938/jkps.58.1380
- ISSN
- 0374-4884
- Abstract
- In this paper, a novel technique for the assembly of single-walled carbon nanotubes (SWCNTs), and which was demonstrated using only a photolithographic process without additional chemical steps, is proposed. In this new process, unlike the conventional self-assembled process using octadecyltrichlorosilane (OTS), the SWCNTs could be selectively absorbed on a SiO2/Si substrate. First of all, the selectively assembled channels of the SWCNTs were fabricated on the SiO2 surface for a field effect transistor (FET). We finally fabricated SWCNT-based FETs by using our proposed technique. This technique will provide a useful basis for the implementation of various FET devices with SWCNT channels.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > School of Electrical Engineering > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.