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Micromachined catalytic combustible hydrogen gas sensor
- Authors
- Lee, Eui-Bok; Hwang, In-Sung; Cha, Jung-Ho; Lee, Ho-Jun; Lee, Won-Bae; Pak, James Jungho; Lee, Jong-Heun; Ju, Byeong-Kwon
- Issue Date
- 20-4월-2011
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- Catalytic combustion; MEMS; Hydrogen gas sensor
- Citation
- SENSORS AND ACTUATORS B-CHEMICAL, v.153, no.2, pp.392 - 397
- Indexed
- SCIE
SCOPUS
- Journal Title
- SENSORS AND ACTUATORS B-CHEMICAL
- Volume
- 153
- Number
- 2
- Start Page
- 392
- End Page
- 397
- ISSN
- 0925-4005
- Abstract
- An integrated catalytic combustion H-2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm(2) and the catalytic combustion sensor showed high response to H-2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H-2 were 0.36 s and 1.29 s, respectively. (C) 2010 Elsevier B.V. All rights reserved.
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