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Micromachined catalytic combustible hydrogen gas sensor

Authors
Lee, Eui-BokHwang, In-SungCha, Jung-HoLee, Ho-JunLee, Won-BaePak, James JunghoLee, Jong-HeunJu, Byeong-Kwon
Issue Date
20-4월-2011
Publisher
ELSEVIER SCIENCE SA
Keywords
Catalytic combustion; MEMS; Hydrogen gas sensor
Citation
SENSORS AND ACTUATORS B-CHEMICAL, v.153, no.2, pp.392 - 397
Indexed
SCIE
SCOPUS
Journal Title
SENSORS AND ACTUATORS B-CHEMICAL
Volume
153
Number
2
Start Page
392
End Page
397
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/112647
DOI
10.1016/j.snb.2010.11.004
ISSN
0925-4005
Abstract
An integrated catalytic combustion H-2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm(2) and the catalytic combustion sensor showed high response to H-2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H-2 were 0.36 s and 1.29 s, respectively. (C) 2010 Elsevier B.V. All rights reserved.
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공과대학 (전기전자공학부)
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