Heterogeneous structure of a magnetohydrodynamic mixer made by the LTCC process using a photoimageable slurry

Abstract

A novel microfabrication process for the creation of a magnetohydrodynamic (MHD) mixer is presented using a photoimageable low temperature co-fired ceramic (LTCC). A monolithic structure was formed by UV photolithographic patterning and screen printing. The structure consists of a microfluidic channel and silver electrodes on a LTCC layer. The fluids in the microfluidic channel were controlled by a Lorentz force. A maximum mixing efficiency of 85.4% was achieved with AC peak-to-peak voltages of 8 V at 1 Hz. A photolithographic technique for patterning the microfluidic channel in the LTCC process is promising in order to realize a complex heterogeneous structure and it serves as an enabling tool in extending the applicability of ceramic-based microfluidic devices.