Fabrication of Nanometer-scale Pillar Structures by Using Nanosphere Lithography
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yang, Ji Won | - |
dc.contributor.author | Sim, Jae In | - |
dc.contributor.author | An, Ho Myoung | - |
dc.contributor.author | Kim, Tae Geun | - |
dc.date.accessioned | 2021-09-07T13:49:14Z | - |
dc.date.available | 2021-09-07T13:49:14Z | - |
dc.date.created | 2021-06-14 | - |
dc.date.issued | 2011-04 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/112802 | - |
dc.description.abstract | In this work, we have successfully fabricated a periodic array of nanostructures on the GaN, sapphire and silicon substrates by using a nanosphere lithography. First; a polystyrene nanosphere monolayer with a diameter of 500 nm was spin-coated on the substrates; then, an oxygen plasma was applied to the monolayer using a reactive ion etching system to make spacings among the nanospheres so that one could control the on/off ratio of the pitch and the shape of the nanoscale pillar structures. Next, evenly-spaced polystyrene nanospheres were used as a mask for inductively-coupled plasma reactive ion etching to make nanoscale pillar structures of different shapes and depths on the substrates. These experimental results are expected to offer a milestone for the application of nanostructures to various semiconductor devices. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.subject | NATURAL LITHOGRAPHY | - |
dc.subject | LATEX-PARTICLES | - |
dc.subject | FILMS | - |
dc.subject | ARRAY | - |
dc.subject | CRYSTALS | - |
dc.subject | SURFACES | - |
dc.title | Fabrication of Nanometer-scale Pillar Structures by Using Nanosphere Lithography | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kim, Tae Geun | - |
dc.identifier.doi | 10.3938/jkps.58.994 | - |
dc.identifier.scopusid | 2-s2.0-79955059760 | - |
dc.identifier.wosid | 000289611700009 | - |
dc.identifier.bibliographicCitation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.58, no.4, pp.994 - 997 | - |
dc.relation.isPartOf | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.citation.title | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.citation.volume | 58 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 994 | - |
dc.citation.endPage | 997 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.identifier.kciid | ART001545370 | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
dc.subject.keywordPlus | NATURAL LITHOGRAPHY | - |
dc.subject.keywordPlus | LATEX-PARTICLES | - |
dc.subject.keywordPlus | FILMS | - |
dc.subject.keywordPlus | ARRAY | - |
dc.subject.keywordPlus | CRYSTALS | - |
dc.subject.keywordPlus | SURFACES | - |
dc.subject.keywordAuthor | Gallium nitride (GaN) | - |
dc.subject.keywordAuthor | Light-emitting diode (LED) | - |
dc.subject.keywordAuthor | Nanosphere lithography (NSL) | - |
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