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High-resolution parallel multipass laser interferometer with an interference fringe spacing of 15 nm
- Authors
- Lee, Jeongmin; Yoon, Hosang; Yoon, Tai Hyun
- Issue Date
- 1-3월-2011
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- High-resolution interferometer; Parallel multipass configuration; Interference fringe subdivision
- Citation
- OPTICS COMMUNICATIONS, v.284, no.5, pp.1118 - 1122
- Indexed
- SCIE
SCOPUS
- Journal Title
- OPTICS COMMUNICATIONS
- Volume
- 284
- Number
- 5
- Start Page
- 1118
- End Page
- 1122
- ISSN
- 0030-4018
- Abstract
- We present a high-resolution laser interferometer based on the parallel multipass configuration with a pair of right-angle prisms to increase the optical fringe subdivision order up to 21. In the experiment, a multipass homodyne Michelson interferometer (MHMI) with the fringe spacing of 15 nm was demonstrated, resulting in the displacement measurement with a measurement resolution of 180 pm limited by the sampling rate of the employed analog-to-digital converter. We show that the ultimate resolution of the demonstrated MHMI scales with 1/N and it is estimated to be 8.7 pm for N=21. (C) 2010 Elsevier B.V. All rights reserved.
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