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Fabrication of submicron metallic grids with interference and phase-mask holography
- Issue Date
- 1월-2011
- Publisher
- SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
- Keywords
- holographic interferometry; photonic bandgap materials; complex nanostructures; fabrication and characterization nanoscale materials; methods of micro- and nanofabrication
- Citation
- JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.10, no.1
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
- Volume
- 10
- Number
- 1
- ISSN
- 1932-5150
- Abstract
- Complex, submicron Cu metallic mesh nanostructures are made by electrochemical deposition using polymer templates made from photoresist. The polymer templates are fabricated with photoresist using two- beam interference holography and phase mask holography with three diffracted beams. Freestanding metallic mesh structures are made in two separate electrodepositions with perpendicular photoresist grating templates. Cu mesh square nanostructures having large (52.6%) open areas are also made by single electrodeposition with a photoresist template made with a phase mask. These structures have potential as electrodes in photonic devices. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3541794]
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