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Fabrication and characterization of CdTe nano pattern on flexible substrates by nano imprinting and electrodeposition

Authors
Chun, SeungjuHan, Kang-SooShin, Ju-HyeonLee, HeonKim, Donghwan
Issue Date
11월-2010
Publisher
ELSEVIER
Keywords
Electrodeposition; Nano imprinting; Flexible substrate; CdTe nano pattern
Citation
MICROELECTRONIC ENGINEERING, v.87, no.11, pp.2097 - 2102
Indexed
SCIE
SCOPUS
Journal Title
MICROELECTRONIC ENGINEERING
Volume
87
Number
11
Start Page
2097
End Page
2102
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/115410
DOI
10.1016/j.mee.2010.01.004
ISSN
0167-9317
Abstract
Nano imprinting technology and the electrodeposition method were applied to make CdTe nano patterns on flexible substrates. An ammonia based aqueous solution was prepared at pH 10.7 and indium tin oxide (ITO)/polyethylene naphthalate (PEN) film with template was used as the working electrode. ITO thin film which was coated on PEN film had good electrical conductivity and optical transmittance. The template was manufactured by nano imprinting technology on ITO/PEN film. It was made from benzyl methacrylate and had nano rod arrays. It was used as the working electrode and for making CdTe nano pattern. CdTe nano pattern were analyzed by X-ray diffractometer, dual beam (DB)-focused ion beam (FIB)-scanning electron microscopy (SEM), Raman spectroscopy, and ultraviolet (UV)-visible (VIS) spectroscopy. The structure and optical properties of CdTe nano pattern on flexible substrates was analyzed. The crystalline size of nano pattern had 8.26 nm. The Te particles that were precipitated on CdTe surface seems to be exist. The absence of annealing process influenced to have low absorption coefficient and narrow band gap compared to bulk CdTe. However, nano pattern increased reflectance. (C) 2010 Elsevier B.V. All rights reserved.
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공과대학 (신소재공학부)
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