Fabrication and characterization of CdTe nano pattern on flexible substrates by nano imprinting and electrodeposition
- Authors
- Chun, Seungju; Han, Kang-Soo; Shin, Ju-Hyeon; Lee, Heon; Kim, Donghwan
- Issue Date
- 11월-2010
- Publisher
- ELSEVIER
- Keywords
- Electrodeposition; Nano imprinting; Flexible substrate; CdTe nano pattern
- Citation
- MICROELECTRONIC ENGINEERING, v.87, no.11, pp.2097 - 2102
- Indexed
- SCIE
SCOPUS
- Journal Title
- MICROELECTRONIC ENGINEERING
- Volume
- 87
- Number
- 11
- Start Page
- 2097
- End Page
- 2102
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/115410
- DOI
- 10.1016/j.mee.2010.01.004
- ISSN
- 0167-9317
- Abstract
- Nano imprinting technology and the electrodeposition method were applied to make CdTe nano patterns on flexible substrates. An ammonia based aqueous solution was prepared at pH 10.7 and indium tin oxide (ITO)/polyethylene naphthalate (PEN) film with template was used as the working electrode. ITO thin film which was coated on PEN film had good electrical conductivity and optical transmittance. The template was manufactured by nano imprinting technology on ITO/PEN film. It was made from benzyl methacrylate and had nano rod arrays. It was used as the working electrode and for making CdTe nano pattern. CdTe nano pattern were analyzed by X-ray diffractometer, dual beam (DB)-focused ion beam (FIB)-scanning electron microscopy (SEM), Raman spectroscopy, and ultraviolet (UV)-visible (VIS) spectroscopy. The structure and optical properties of CdTe nano pattern on flexible substrates was analyzed. The crystalline size of nano pattern had 8.26 nm. The Te particles that were precipitated on CdTe surface seems to be exist. The absence of annealing process influenced to have low absorption coefficient and narrow band gap compared to bulk CdTe. However, nano pattern increased reflectance. (C) 2010 Elsevier B.V. All rights reserved.
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