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Hydrogen in polycrystalline ZnO thin films

Authors
Kim, W. M.Kim, Y. H.Kim, J. S.Jeong, J.Baik, Y-JPark, J-KLee, K. S.Seong, T-Y
Issue Date
15-Sep-2010
Publisher
IOP PUBLISHING LTD
Citation
JOURNAL OF PHYSICS D-APPLIED PHYSICS, v.43, no.36
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume
43
Number
36
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/115679
DOI
10.1088/0022-3727/43/36/365406
ISSN
0022-3727
Abstract
The influence and the states of hydrogen in polycrystalline ZnO thin films were investigated by preparing films with different amounts of oxygen vacancies at various hydrogen potentials. The most notable effect of hydrogen addition was passivation of grain boundaries. The majority of hydrogen incorporation in polycrystalline ZnO films was attributed to hydrogen interstitials, and a substantially smaller number of multicentre bonds at oxygen vacancies were formed even at high hydrogen potentials. The major source of free carriers in polycrystalline ZnO films deposited without intentional hydrogen addition was oxygen vacancies with 2+ charge state with large atomic relaxation.
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College of Engineering (Department of Materials Science and Engineering)
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