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High Sensitive NO2 Gas Sensor with Low Power Consumption Using Selectively Grown ZnO Nanorods
- Authors
- Park, S. J.; Park, J.; Lee, H. Y.; Moon, S. E.; Park, K-H; Kim, J.; Maeng, S.; Udrea, F.; Milne, W. I.; Kim, G. T.
- Issue Date
- 5월-2010
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Keywords
- ZnO Nanorods; Sol-Gel Growth Method; Micro Heater; Semiconducting Gas Sensor
- Citation
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.10, no.5, pp.3385 - 3388
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Volume
- 10
- Number
- 5
- Start Page
- 3385
- End Page
- 3388
- ISSN
- 1533-4880
- Abstract
- The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value.
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