Fabrication of sub-micron 3-D structure using duo-mold UV-RIL process
- Authors
- Han, Kang-Soo; Hong, Sung-Hoon; Jeong, Jun-Ho; Lee, Heon
- Issue Date
- 4월-2010
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- PVA(poly vinyl alcohol); RIL(reversal imprint lithography); NIL(nano-imprint lithography); Residual thickness
- Citation
- MICROELECTRONIC ENGINEERING, v.87, no.4, pp.610 - 613
- Indexed
- SCIE
SCOPUS
- Journal Title
- MICROELECTRONIC ENGINEERING
- Volume
- 87
- Number
- 4
- Start Page
- 610
- End Page
- 613
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/116760
- DOI
- 10.1016/j.mee.2009.08.022
- ISSN
- 0167-9317
- Abstract
- 3-D polymeric micro- and nano-structures were fabricated by the reversal imprint lithography technique using nano-patterned molds. A surface-treated quartz mold and a water-soluble poly vinyl alcohol (PVA) mold were used to make dual-side patterned, 2-D polymeric, micro- and nano-structures. First, UV-curable, polymeric resin was dropped onto the quartz mold, which was then covered with the PVA mold. The two stacked molds were pressed and exposed to UV-Iight to cure the resin. The cured polymeric resin (the reversal layer) was easily released from the quartz mold, because the surface of the latter was treated with an anti-stiction layer. The reversal layer, bound to the PVA mold, was transferred to a Si substrate by applying a thin layer of a UV-curable bonding agent. After bonding the reversal layer, the PVA mold was selectively removed by dipping in water. As a result, the dual-side patterned, thin polymeric 2-D structure was formed on the silicon substrate and, by repeating this process, 2-D nano-structures were stacked to form a 3-D nano-structure. By making use of the anti-stiction-treated, quartz mold and the water-soluble characteristic of the PVA material, the reliable release of the reversal layer was achieved. (C) 2009 Elsevier B.V. All rights reserved.
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