Support Vector Machine-Regression을 이용한 주기신호의 이상탐지

Abstract

This paper presents a non-linear control chart based on support vector machine regression (SVM-R) to improve the accuracy of fault detection of cyclic signals. The proposed algorithm consists of the following two steps. First, the center line of the control chart is constructed by using SVM-R. Second, we calculate control limits by variances that are estimated by perpendicular and normal line of the center line. For performance evaluation, we apply proposed algorithm to the industrial data of the chemical vapor deposition process which is one of the semiconductor processes. The proposed method has better fault detection performance than other existing method