ScholarWorks@Korea University

Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

A Model-Based Analysis of Plasma Parameters and Composition in HBr/X (X=Ar, He, N-2) Inductively Coupled Plasmas

Full metadata record
DC Field Value Language
dc.contributor.authorKwon, Kwang-Ho-
dc.contributor.authorEfremov, Alexander-
dc.contributor.authorKim, Moonkeun-
dc.contributor.authorMin, Nam Ki-
dc.contributor.authorJeong, Jaehwa-
dc.contributor.authorKim, Kwangsoo-
dc.date.accessioned2021-09-08T10:25:31Z-
dc.date.available2021-09-08T10:25:31Z-
dc.date.created2021-06-11-
dc.date.issued2010-
dc.identifier.issn0013-4651-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/118667-
dc.description.abstractThis work discusses the effect of gas mixing ratio on the HBr/X (X=Ar, He, or N-2) plasma parameters, steady-state densities, and fluxes of active species in the planar inductively coupled plasma reactor. The investigation combined plasma diagnostics by Langmuir probes and a global (zero-dimensional) plasma model with Maxwellian approximation for the electron energy distribution function. The dilution of HBr by Ar results in a maximum effect on the HBr electron impact dissociation kinetics and provides a favorable condition for an ion-assisted chemical reaction.-
dc.languageEnglish-
dc.language.isoen-
dc.publisherELECTROCHEMICAL SOC INC-
dc.subjectELECTRON-ENERGY DISTRIBUTION-
dc.subjectACTIVE SPECIES KINETICS-
dc.subjectMODULATED HIGH-DENSITY-
dc.subjectGLOBAL-MODEL-
dc.subjectSURFACE KINETICS-
dc.subjectDISCHARGES-
dc.subjectBROMINE-
dc.subjectAR-
dc.subjectRECOMBINATION-
dc.subjectPOLYSILICON-
dc.titleA Model-Based Analysis of Plasma Parameters and Composition in HBr/X (X=Ar, He, N-2) Inductively Coupled Plasmas-
dc.typeArticle-
dc.contributor.affiliatedAuthorKwon, Kwang-Ho-
dc.contributor.affiliatedAuthorMin, Nam Ki-
dc.contributor.affiliatedAuthorJeong, Jaehwa-
dc.identifier.doi10.1149/1.3362943-
dc.identifier.scopusid2-s2.0-77951202134-
dc.identifier.wosid000276555300072-
dc.identifier.bibliographicCitationJOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.157, no.5, pp.H574 - H579-
dc.relation.isPartOfJOURNAL OF THE ELECTROCHEMICAL SOCIETY-
dc.citation.titleJOURNAL OF THE ELECTROCHEMICAL SOCIETY-
dc.citation.volume157-
dc.citation.number5-
dc.citation.startPageH574-
dc.citation.endPageH579-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaElectrochemistry-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalWebOfScienceCategoryElectrochemistry-
dc.relation.journalWebOfScienceCategoryMaterials Science, Coatings & Films-
dc.subject.keywordPlusELECTRON-ENERGY DISTRIBUTION-
dc.subject.keywordPlusACTIVE SPECIES KINETICS-
dc.subject.keywordPlusMODULATED HIGH-DENSITY-
dc.subject.keywordPlusGLOBAL-MODEL-
dc.subject.keywordPlusSURFACE KINETICS-
dc.subject.keywordPlusDISCHARGES-
dc.subject.keywordPlusBROMINE-
dc.subject.keywordPlusAR-
dc.subject.keywordPlusRECOMBINATION-
dc.subject.keywordPlusPOLYSILICON-
dc.subject.keywordAuthorargon-
dc.subject.keywordAuthorelectron impact dissociation-
dc.subject.keywordAuthorgas mixtures-
dc.subject.keywordAuthorhelium-
dc.subject.keywordAuthorhydrogen compounds-
dc.subject.keywordAuthorLangmuir probes-
dc.subject.keywordAuthornitrogen-
dc.subject.keywordAuthorplasma chemistry-
dc.subject.keywordAuthorplasma density-
dc.subject.keywordAuthorplasma simulation-
dc.subject.keywordAuthorreaction kinetics theory-
Files in This Item
There are no files associated with this item.
Appears in
Collections
Graduate School > Department of Control and Instrumentation Engineering > 1. Journal Articles
College of Science and Technology > Department of Electro-Mechanical Systems Engineering > 1. Journal Articles
Show simple item record

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Jeong, Jae hwa photo

Jeong, Jae hwa
과학기술대학 (전자·기계융합공학과)
Read more

Altmetrics

Total Views & Downloads

STATISTICS
Total View :8,913,232
Today View :33,821

RSS_1.0 RSS_2.0 ATOM_1.0

CONTACT US

(02841) 서울특별시 성북구 안암로 14502-3290-1114

COPYRIGHT © 2021 Korea University. All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

BROWSE

English