Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films
- Authors
- Tark, S. J.; Ok, Y. -W.; Kang, M. G.; Lim, H. J.; Kim, W. M.; Kim, D.
- Issue Date
- 10월-2009
- Publisher
- SPRINGER
- Keywords
- ZnO; Al doping; Hydrogenated; rf magnetron sputtering
- Citation
- JOURNAL OF ELECTROCERAMICS, v.23, no.2-4, pp.548 - 553
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF ELECTROCERAMICS
- Volume
- 23
- Number
- 2-4
- Start Page
- 548
- End Page
- 553
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/119235
- DOI
- 10.1007/s10832-008-9532-0
- ISSN
- 1385-3449
- Abstract
- This study examined the effect of the hydrogen ratio on the electrical and optical properties of hydrogenated Al-doped zinc oxide (AZO) thin films deposited by rf magnetron sputtering using a ceramic target (98 wt% ZnO, 2 wt% Al2O3). Various AZO films on glass were prepared by changing the H-2/(Ar + H-2) ratio at room temperature. The AZO/H films showed a lower resistivity and a higher carrier concentration and mobility than the AZO films. However, the resistivity and mobility of the AZO/H films increased and decreased with increasing H-2 flow ratio, respectively. As a result, the AZO/H films grown with 2% H-2 addition showed excellent electrical properties with a resistivity of 4.98 x 10(4) Omega cm. The UV-measurements showed that the optical transmission of the AZO/H films was > 85% in the visible range with a wide optical band gap. In addition, the effect of H-2 flow ratio on the structure and composition of hydrogenated AZO thin films have also been studied.
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Collections - College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
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