Microhotplate-Based High-Speed Polyimide Capacitive Humidity Sensors
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Myong Jin | - |
dc.contributor.author | Min, Nam-Ki | - |
dc.contributor.author | Yoo, Kum-Pyo | - |
dc.contributor.author | Kwak, Ki-Young | - |
dc.contributor.author | Kwon, Kwang-Ho | - |
dc.date.accessioned | 2021-09-08T14:58:37Z | - |
dc.date.available | 2021-09-08T14:58:37Z | - |
dc.date.created | 2021-06-10 | - |
dc.date.issued | 2009-08 | - |
dc.identifier.issn | 1546-198X | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/119519 | - |
dc.description.abstract | Polyimide thin films are locally cured on a sensor chip using MEMS microhotplates as an alternative solution to the conventional thermal curing and evaluated as high-speed humidity sensor materials. The polyimide locally cured at a temperature over 350 degrees C for 1 hour exhibits full imidization. There is no significant difference between the polyimide thin films cured in a conventional convection oven and those cured locally on MEMS microhotplates. The locally cured polyimide humidity sensors with a micro-bridge structure created using front-side etching with XeF2 gas show a sensitivity of 0.77 pF/%RH, a hysteresis of 0.61%RH, and a response time of 2.5 s. They also exhibit a low dielectric loss. In comparison, the sensors with a conventional structure exhibit a time response of 7 s. These results indicate that the locally cured polyimide films may be used as a dielectric material in high speed humidity sensors. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | AMER SCIENTIFIC PUBLISHERS | - |
dc.title | Microhotplate-Based High-Speed Polyimide Capacitive Humidity Sensors | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Min, Nam-Ki | - |
dc.identifier.doi | 10.1166/sl.2009.1102 | - |
dc.identifier.scopusid | 2-s2.0-73449143490 | - |
dc.identifier.wosid | 000272393700002 | - |
dc.identifier.bibliographicCitation | SENSOR LETTERS, v.7, no.4, pp.517 - 522 | - |
dc.relation.isPartOf | SENSOR LETTERS | - |
dc.citation.title | SENSOR LETTERS | - |
dc.citation.volume | 7 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 517 | - |
dc.citation.endPage | 522 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Electrochemistry | - |
dc.relation.journalResearchArea | Instruments & Instrumentation | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Analytical | - |
dc.relation.journalWebOfScienceCategory | Electrochemistry | - |
dc.relation.journalWebOfScienceCategory | Instruments & Instrumentation | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordAuthor | Locally Cured Polyimide | - |
dc.subject.keywordAuthor | Microhotplate | - |
dc.subject.keywordAuthor | Capacitive Humidity Sensor | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.