Ultra Thin CVD Diamond Film Deposition by Electrostatic Self-Assembly Seeding Process with Nano-Diamond Particles
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, J. H. | - |
dc.contributor.author | Lee, S. K. | - |
dc.contributor.author | Kwon, O. M. | - |
dc.contributor.author | Lim, D. S. | - |
dc.date.accessioned | 2021-09-08T15:53:59Z | - |
dc.date.available | 2021-09-08T15:53:59Z | - |
dc.date.created | 2021-06-10 | - |
dc.date.issued | 2009-07 | - |
dc.identifier.issn | 1533-4880 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/119777 | - |
dc.description.abstract | Ultra thin and smooth nano crystalline diamond films were fabricated with electrostatic self-assembly seeding of explosively synthesized nano-diamond particles. Hard aggregates of nano-diamond particles were crushed by high revolution attrition milling at 1000 RPM to regulate the particle size. Through this process, cationic nano-diamond particles were coated with anionic PSS (poly sodium 4-styrene sulfonate) electrolytes. Anionic Si(100) substrate was coated with cationic PDDA (poly diallyldimethyl ammonium chloride) solution. Si(100)/PDDA/PSS/ND (nano-diamond) layer-by-layer structure was formed as a seeding layer by the simple dipping and rinsing of positively charged substrate into anionic PSS/nano-diamond solution. Throughout the seeding process, neither mechanical damage nor chemical attack was observed on the substrate. Every stage of this preparation was carried out at room temperature and pressure. The effect of attrition milling was determined by changing the milling time from 1 hr to 5 hrs. Through the attritional milling and monolayer formation of the nano-diamond, nucleation density was increased up to 3 x 10(11)/cm(2). Typical hot filament chemical vapor deposition system was used to coat the diamond film on the ESA (electrostatic self-assembly) seeded Si(100) substrate. Although typical diamond deposition conditions (90 torr/1% CH4 in H-2/800 degrees C) were maintained, ultra thin (< 100 nm) and continuous nano crystalline diamond films were deposited. Regardless of metallic or ceramic substrate, ESND (ESA Seeding of nano-diamond) process is applicable if the substrate has any charge. This simple nano technology based process ensures high thickness uniformity of diamond coating without visible edge effect. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | AMER SCIENTIFIC PUBLISHERS | - |
dc.subject | DOPED DIAMOND | - |
dc.subject | NUCLEATION | - |
dc.title | Ultra Thin CVD Diamond Film Deposition by Electrostatic Self-Assembly Seeding Process with Nano-Diamond Particles | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kwon, O. M. | - |
dc.contributor.affiliatedAuthor | Lim, D. S. | - |
dc.identifier.doi | 10.1166/jnn.2009.M20 | - |
dc.identifier.wosid | 000267994000020 | - |
dc.identifier.bibliographicCitation | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.9, no.7, pp.4121 - 4127 | - |
dc.relation.isPartOf | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | - |
dc.citation.title | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | - |
dc.citation.volume | 9 | - |
dc.citation.number | 7 | - |
dc.citation.startPage | 4121 | - |
dc.citation.endPage | 4127 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | DOPED DIAMOND | - |
dc.subject.keywordPlus | NUCLEATION | - |
dc.subject.keywordAuthor | CVD Diamond Film | - |
dc.subject.keywordAuthor | Nano-Diamond | - |
dc.subject.keywordAuthor | Seeding | - |
dc.subject.keywordAuthor | Electrostatic Self-Assembly | - |
dc.subject.keywordAuthor | Nucleation Density | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.