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Fabrication of Fe3O4 Thin Film using Reactive DC Magnetron Sputtering

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dc.contributor.authorJung, Minkyung-
dc.contributor.authorPark, Sungmin-
dc.contributor.authorPark, Daewon-
dc.contributor.authorLee, Seong-Rae-
dc.date.accessioned2021-09-08T16:20:43Z-
dc.date.available2021-09-08T16:20:43Z-
dc.date.created2021-06-10-
dc.date.issued2009-06-
dc.identifier.issn1738-8228-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/119871-
dc.description.abstractWe investigated the effects of deposition conditions on the fabrication of Fe3O4 thin films using a reactive DC magnetron sputtering at room temperature. The structural, electrical, and magnetic properties of Fe oxide films dependence on the film thickness, oxygen flow rate, and the substrate crystallinity were also studied. We have successfully fabricated Fe3O4 film with thickness of about 10 nm under optimal reactive sputtering conditions. The saturation magnetization, resistivity, and Verwey transition of the Fe3O4 film were 298 emu/cc, 4.0x10(-2) Omega cm, and 125 K, respectively.-
dc.languageKorean-
dc.language.isoko-
dc.publisherKOREAN INST METALS MATERIALS-
dc.subjectHALF-METALLIC FERROMAGNET-
dc.subjectTUNNEL-JUNCTIONS-
dc.subjectMULTILAYERED FILMS-
dc.subjectROOM-TEMPERATURE-
dc.subjectMAGNETORESISTANCE-
dc.subjectCRO2-
dc.subjectDEVICES-
dc.titleFabrication of Fe3O4 Thin Film using Reactive DC Magnetron Sputtering-
dc.typeArticle-
dc.contributor.affiliatedAuthorLee, Seong-Rae-
dc.identifier.scopusid2-s2.0-68249124833-
dc.identifier.wosid000267607100008-
dc.identifier.bibliographicCitationJOURNAL OF THE KOREAN INSTITUTE OF METALS AND MATERIALS, v.47, no.6, pp.378 - 382-
dc.relation.isPartOfJOURNAL OF THE KOREAN INSTITUTE OF METALS AND MATERIALS-
dc.citation.titleJOURNAL OF THE KOREAN INSTITUTE OF METALS AND MATERIALS-
dc.citation.volume47-
dc.citation.number6-
dc.citation.startPage378-
dc.citation.endPage382-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.identifier.kciidART001353699-
dc.description.journalClass1-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.description.journalRegisteredClasskci-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaMetallurgy & Metallurgical Engineering-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryMetallurgy & Metallurgical Engineering-
dc.subject.keywordPlusHALF-METALLIC FERROMAGNET-
dc.subject.keywordPlusTUNNEL-JUNCTIONS-
dc.subject.keywordPlusMULTILAYERED FILMS-
dc.subject.keywordPlusROOM-TEMPERATURE-
dc.subject.keywordPlusMAGNETORESISTANCE-
dc.subject.keywordPlusCRO2-
dc.subject.keywordPlusDEVICES-
dc.subject.keywordAuthorFe3O4 film-
dc.subject.keywordAuthorhalf metallic reactive sputtering-
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