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Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography

Authors
Hwang, Seon YongJung, Ho YongJeong, Jun-HoLee, Heon
Issue Date
29-May-2009
Publisher
ELSEVIER SCIENCE SA
Keywords
Metal nano-pattern; Flexible substrate; PET (polyethylene-terephthalate); PVA (poly-vinyl alcohol); Bi-layer imprint
Citation
THIN SOLID FILMS, v.517, no.14, pp.4104 - 4107
Indexed
SCIE
SCOPUS
Journal Title
THIN SOLID FILMS
Volume
517
Number
14
Start Page
4104
End Page
4107
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/120022
DOI
10.1016/j.tsf.2009.01.164
ISSN
0040-6090
Abstract
Polymer films are widely used as a substrate for displays and for solar cells since they are cheap, transparent and flexible, and their material properties are easy to design. Polyethylene-terephthalate (PET) is especially useful for various applications requiring transparency, flexibility and good thermal and chemical resistance. In this study, nano-sized metal patterns were fabricated on flexible PET film by using nanoimprint lithography (NIL). Water-soluble poly-vinyl alcohol (PVA) resin was used as a planarization and sacrificial layer for the liftoff process. as it does not damage the PET films and can easily be etched off by using oxygen plasma. NIL was used to fabricate the nano-sized patterns on the non-planar or flexible substrate. Finally, a nano-sized metal pattern was successfully formed by depositing the metal layer over the imprinted resist patterns and applying the lift-off process, which is economic and environmentally friendly, to the PET films. (C) 2009 Elsevier B.V. All rights reserved.
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