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Microelectromechanical-System-Based Variable-Focus Liquid Lens for Capsule Endoscopes
- Authors
- Seo, Sang Won; Han, Seungoh; Seo, Jun Ho; Kim, Young Mok; Kang, Moon Sik; Min, Nam Ki; Choi, Woo Beom; Sung, Man Young
- Issue Date
- 5월-2009
- Publisher
- IOP PUBLISHING LTD
- Keywords
- Microelectromechanical System; Liquid Lens
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS, v.48, no.5
- Indexed
- SCIE
SCOPUS
- Journal Title
- JAPANESE JOURNAL OF APPLIED PHYSICS
- Volume
- 48
- Number
- 5
- ISSN
- 0021-4922
- Abstract
- A liquid lens based on the electrowetting phenomenon was designed to be cylindrical to minimise dead are. The lens was fabricated with microelectromechanical-system (MEMS) technology using silicon thin film and wafer bonding processes. A multiple dielectric layer comprising Teflon, silicon nitride, and thermal oxide was formed on the cylinder wall. With a change of 11 V-rms in the applied bias, the lens module, including the fabricated liquid lens, showed a focal length change of approximately 166 mm. A capsule endoscope was assembled, including the lens module, and was successfully used to take images of a pig colon at various focal lengths. (C) 2009 The Japan Society of Applied Physics
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