Fabrication of Moth-Eye Structure on Glass by Ultraviolet Imprinting Process with Polymer Template
- Authors
- Bae, Byeong-Ju; Hong, Sung-Hoon; Hong, Eun-Ju; Lee, Heon; Jung, Gun-young
- Issue Date
- 1월-2009
- Publisher
- IOP PUBLISHING LTD
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS, v.48, no.1
- Indexed
- SCIE
SCOPUS
- Journal Title
- JAPANESE JOURNAL OF APPLIED PHYSICS
- Volume
- 48
- Number
- 1
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/120864
- DOI
- 10.1143/JJAP.48.010207
- ISSN
- 0021-4922
- Abstract
- An antireflection moth-eye structure was fabricated on a glass substrate by ultraviolet nanoimprint lithography (UV-NIL). A Ni template with an artificial conical structure was fabricated by laser interference lithography an used as a stamp for embossing. A transparent PVC template was fabricated by hot embossing. The embossed poly(vinyl chloride) (PVC) film was then used as an imprint template after depositing SiO2 and a self-assembled monolayer (SAM). Using the embossed PVC film as a UV-NIL stamp, a polymer based moth-eye structure was formed on the glass template and its transmittance, parallel to surface normal, was increased to 93% for a single side patterned and 97% for a double side patterned. However, at wavelengths shorter than 430 nm, the transmittance of 30 degrees-rotated glass substrate with a moth-eye structure became lower than that of the bare glass substrate, while the transmittance was not changed for longer wavelength regions. (C) 2009 The Japan Society of Applied Physics
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